In accordance with the invention, a MEMs mirror device comprises a mirror
layer including a frame structure and at least one mirror movably coupled
to the frame and an actuator layer including at least one conductive path
and at least one electrode for moving the mirror. The mirror layer and the
actuator layer are provided with metallization pads and are bonded
together in lateral alignment and with predetermined vertical gap spacing
by solder bonds between the pads. The device has utility in optical cross
connection, variable attenuation and power gain equalization.