The present invention relates to a method for creating a pattern on a
workpiece with better pattern fidelity and dimensional precision. The
method comprises the steps of: providing a source for emitting
electromagnetic radiation, illuminating by said radiation a spatial light
modulator (SLM) having a multitude of pixels, projecting an image of the
modulator on the workpiece, moving said workpiece and/or projection system
relative to each other, reading from an information storage device a
digital description of the pattern to be written, extracting from the
pattern description a sequence of partial patterns, converting said
partial patterns to modulator signals, and feeding said signals to the
modulator, further coordinating the workpiece, the modulator and the
radiation source, so that said pattern is stitched together from the
partial images, further exposing said pattern in at least two separate
exposures, where at one exposure corrections are applied for errors
occurring during another exposure.